25 August 2000 Dynamic actuation behavior of NiTi/Si diaphragm micropump
Author Affiliations +
Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396449
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
A novel micropump actuated by NiTi/Si diaphragm has been developed. In order to optimize the actuating performance of the micropump, the dynamic actuating properties were studied in different actuating conditions such as different actuating currents, frequencies and duty cycles. The experimental result show that there is a maximum displacement when increasing the actuating current and frequency. The influence of duty cycle on maximum displacement when increasing the actuating current and frequency. The influence of duty cycle on maximum displacement with water flow and without water flow is different. The higher the displacement of the diaphragm is, the larger the flow rate is for a given frequency. The displacement of the pump diaphragm depends not only on the flow rate, but also on the moving frequency. The change of the resistance of NiTi strip indicates that the A - M phase transformation is completed partly during dynamic actuating processes. The maximum flow rate of 360 (mu) l/min was obtained in about 50Hz with 1:1 duty cycle in our experiment.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Dong Xu, Dong Xu, Li Wang, Li Wang, Guifu Ding, Guifu Ding, Yong Zhou, Yong Zhou, Aibin Yu, Aibin Yu, Xiulan Cheng, Xiulan Cheng, Jian Chen, Jian Chen, Bingchu Cai, Bingchu Cai, } "Dynamic actuation behavior of NiTi/Si diaphragm micropump", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396449; https://doi.org/10.1117/12.396449
PROCEEDINGS
7 PAGES


SHARE
Back to Top