Fabrication of horn-shaped antenna array using SU-8 and application to the bolometer

Taeseok Sim; Sung W. Moon; Sung Woo Hwang; Kyoung-Soo Chae; Myung-Hwan Oh

doi:10.1117/12.396470

25 August 2000 Fabrication of horn-shaped antenna array using SU-8 and application to the bolometer

Taeseok Sim, Sung W. Moon, Sung Woo Hwang, Kyoung-Soo Chae, Myung-Hwan Oh

Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396470
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

Although the 3D antenna coupled structure type Bolometer has many advantages, the challenge for fabricating 3D antenna coupled structures could not be carried out due to the difficulty of fabrication. The purpose of this paper is to propose the new 3D antenna coupled bolometer structure and to find a possibility of fabricating 3D antenna structure. We propose to use horn antenna because it is well known that the horn antenna has the best efficiency in the upper range of radio frequency. Since lengthening the height of horn when the aperture size of horn is field enhances the efficiency of the horn antenna. The difficulty of fabrication of 3D antenna is on the horn shape fabrication itself. In this study, we focus on the verification of the probability of fabrication a micro horn shape and purpose to use SU-8 to fabricate a high horn shape in this paper. Because the UV is a light, when the lithography process is done, the UV disperse and refracts from the edge of mask patterns. We utilize this property of UV to make a horn shape. At first we experimented to set up a standard process condition. The acquired standard conditions are the data ranged from 10 to 275 micrometers in thickness. Fixing standard condition for the 20 and 100 micrometers thickness except dose, we changed UV dose condition form 84 mJ/cm² to 3000 mJ/cm², and checked the side wall profile of the test pattern structures by SEM. They had sloped side-wall profiles and showed the possibility of fabricating horn shape antenna array using SU-8. Consequently, it seems to be possible to fabricate the horn antenna array coupled with bolometers.

Citation Download Citation

Taeseok Sim, Sung W. Moon, Sung Woo Hwang, Kyoung-Soo Chae, and Myung-Hwan Oh "Fabrication of horn-shaped antenna array using SU-8 and application to the bolometer", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396470

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