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25 August 2000 Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol
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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396426
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
In silicon surface micromachining, the HF GPE process was verified as a very effective method for the dry release of microstructures. The developed GPE system with anhydrous HF gas and 2-propanol vapor was characterized and its selective etching properties were discussed. The polysilicon membrane was used as a structural layer and LTO and PECVD oxide as a sacrificial layer. We successfully fabricated the surface micromachined microstructures of a thermally driven micropump with no virtually process-induced stiction and no residues after the GPE of sacrificial oxides on polysilicon substrates.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Won-Ick Jang, Chang-Auck Choi, Myung-Lae Lee, Chi-Hoon Jun, and Youn Tae Kim "Fabrication of surface-micromachined thermally driven micropump by anhydrous HF gas-phase etching with 2-propanol", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396426
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