25 August 2000 General MEMS process physics simulation and its applications
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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396437
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
Commercial CAD tools for MEMS have significantly contributed to the growth that the MEMS industry has experienced over the past two years by reducing development cycles and enabling the more rapid release of mature MEMS products. Unfortunately, the CAD for MEMS industry has focused primarily on device performance with a concentration on testing and optimizing the performance in a workstation environment. Device manufacturability issues have been neglected and considered secondary design criteria.
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Nora Finch, Nora Finch, Yie He, Yie He, James Marchetti, James Marchetti, } "General MEMS process physics simulation and its applications", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396437; https://doi.org/10.1117/12.396437
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