MEMS/MOEMS for lightwave networks: Can little machines make it big?

David J. Bishop; Vladimir A. Aksyuk; Cristian A. Bolle; C. Randy Giles; Flavio Pardo; Jim A. Walker

doi:10.1117/12.396433

25 August 2000 MEMS/MOEMS for lightwave networks: Can little machines make it big?

David J. Bishop, Vladimir A. Aksyuk, Cristian A. Bolle, C. Randy Giles, Flavio Pardo, Jim A. Walker

Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396433
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

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David J. Bishop, Vladimir A. Aksyuk, Cristian A. Bolle, C. Randy Giles, Flavio Pardo, and Jim A. Walker "MEMS/MOEMS for lightwave networks: Can little machines make it big?", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); https://doi.org/10.1117/12.396433

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