25 August 2000 MEMS/MOEMS for lightwave networks: Can little machines make it big?
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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396433
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
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David J. Bishop, David J. Bishop, Vladimir A. Aksyuk, Vladimir A. Aksyuk, Cristian A. Bolle, Cristian A. Bolle, C. Randy Giles, C. Randy Giles, Flavio Pardo, Flavio Pardo, Jim A. Walker, Jim A. Walker, } "MEMS/MOEMS for lightwave networks: Can little machines make it big?", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396433; https://doi.org/10.1117/12.396433
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