25 August 2000 Microsystems for diverse applications using recently developed microfabrication techniques
Author Affiliations +
Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396435
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
There is no online version at this time. The PDF is only available to people who have bought the paper or have a subscription.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier T. Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico F. de Rooij, "Microsystems for diverse applications using recently developed microfabrication techniques", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396435; https://doi.org/10.1117/12.396435
PROCEEDINGS
12 PAGES


SHARE
Back to Top