25 August 2000 Microsystems for diverse applications using recently developed microfabrication techniques
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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396435
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
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Laurent Dellmann, Laurent Dellmann, Terunobu Akiyama, Terunobu Akiyama, Danick Briand, Danick Briand, Sebastien Gautsch, Sebastien Gautsch, Olivier T. Guenat, Olivier T. Guenat, Benedikt Guldimann, Benedikt Guldimann, Philippe Luginbuhl, Philippe Luginbuhl, Cornel Marxer, Cornel Marxer, Urs Staufer, Urs Staufer, Bart van der Schoot, Bart van der Schoot, Nico F. de Rooij, Nico F. de Rooij, } "Microsystems for diverse applications using recently developed microfabrication techniques", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396435; https://doi.org/10.1117/12.396435
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