25 August 2000 Process development and fabrication of application-specific microvalves
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Proceedings Volume 4174, Micromachining and Microfabrication Process Technology VI; (2000) https://doi.org/10.1117/12.396446
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
MEMS promise to revolutionize nearly every product category by bringing together silicon-based microelectronics fabrication with silicon micromachining technology, thereby, making possible the realizing of complete systems-on-a-chip.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Bai Xu, Bai Xu, James Castracane, James Castracane, Robert E. Geer, Robert E. Geer, Yahong Yao, Yahong Yao, Bruce Altemus, Bruce Altemus, } "Process development and fabrication of application-specific microvalves", Proc. SPIE 4174, Micromachining and Microfabrication Process Technology VI, (25 August 2000); doi: 10.1117/12.396446; https://doi.org/10.1117/12.396446
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