11 August 2000 Micromachined capacitive switches at microwave frequencies
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Proceedings Volume 4175, Materials and Device Characterization in Micromachining III; (2000) https://doi.org/10.1117/12.395601
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
Both electrical and mechanical models, exemplified with a micromachined capacitive switch with simple bridge structure, accurately describing its electrical and mechanical characteristics are described in this paper. The electrical model is represented as a RLC circuit, while the mechanical model is represented as a fixed-fixed beam. The advantage of these models is that it is possible to pre-determine various characteristics, such as the switching time of micromachined capacitive switches, during the design stage. These models can be used to accurately design micromachined capacitive switches for microwave applications. An illustrated fabrication process is also discussed.
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Chee How Wong, Chee How Wong, M. J. Tan, M. J. Tan, Li Hui Guo, Li Hui Guo, J.-M. Huang, J.-M. Huang, Kim Miao Liew, Kim Miao Liew, Ai Qun Liu, Ai Qun Liu, } "Micromachined capacitive switches at microwave frequencies", Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); doi: 10.1117/12.395601; https://doi.org/10.1117/12.395601
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