11 August 2000 Nonlinear dynamic behavior of electrostatically actuated devices
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Proceedings Volume 4175, Materials and Device Characterization in Micromachining III; (2000) https://doi.org/10.1117/12.395610
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
The contribution of this paper is to improve the analytical model of the dynamic system for an electrostatically driven device. Therefore, the material properties such as Young's modulus will be determined more accurately; furthermore, the dynamic behavior of electrostatically actuated devices can be predicted more precisely.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yi-mang Chou, Weileun Fang, "Nonlinear dynamic behavior of electrostatically actuated devices", Proc. SPIE 4175, Materials and Device Characterization in Micromachining III, (11 August 2000); doi: 10.1117/12.395610; https://doi.org/10.1117/12.395610
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