Large deflection of out-of-plane magnetic actuators using surface micromachining

J.-M. Huang; Kim Miao Liew; Ai Qun Liu

doi:10.1117/12.395622

15 August 2000 Large deflection of out-of-plane magnetic actuators using surface micromachining

J.-M. Huang, Kim Miao Liew, Ai Qun Liu

Proceedings Volume 4176, Micromachined Devices and Components VI; (2000) https://doi.org/10.1117/12.395622
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

A magnetic actuator with torsional-polysilicon flexures, capable of very large out-of-plane displacement (the order of 1mm), and individually controlled with integrated coils that will be discussed in this paper. Magnetic actuator uses coils to produce the magnetic field required for individual microactuator motion, while the off-chip magnetic actuates unclamped devices. The advantages of the actuators are exploited: large deflections are achieved using magnetic forces to actuate compliant microflexure structures; Actuation is achieved using magnetic fields generated by off-chip sources; The actuating force is applied in a conducting environment such as a saline fluid. Individually prototype- torsional actuators are deflected over 70$DEG out of the plane of the wafer, when a current of 100 mA flows through a twenty-turn coil integrated into each actuator. The magnetic actuator provides an interaction force of several tens (mu) N between the coil-driven and the off-chip magnetic field. The micro actuators are capable of achieving large deflections (100s of micrometers ) in stationary air and fluid dynamic flow. A completed model of static mechanical and magnetic is built up to characterize mechanical properties including angular deflection, vertical deflection, bending stresses of thin plate. Both the coil- driven and the actuator structure are constructed in polysilicon surface micromachinging process.

Citation Download Citation

J.-M. Huang, Kim Miao Liew, and Ai Qun Liu "Large deflection of out-of-plane magnetic actuators using surface micromachining", Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); https://doi.org/10.1117/12.395622

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KEYWORDS

Magnetism

Actuators

Silicon

Resistance

Fluid dynamics

Metals

Surface micromachining

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