15 August 2000 Microresonator modified as magnetic sensor
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Proceedings Volume 4176, Micromachined Devices and Components VI; (2000) https://doi.org/10.1117/12.395645
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
Balanced doubly suspended structure has been used earlier for very precise high Q resonators. But here we have used the unbalanced half section which is sputter deposited with a magnetic film. The central axis acts like a torsion wire of about a micron width and thickness. The outer arm deflects downwards about the torsion axis when subjected to a magnetic field from beneath the sample. The deflection is measured by the reflected light presently under an optical microscope but can also be done by reflecting a laser beam as done in AFMs. The bending angle - versus - magnetic field is quite linear.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
S. G. Lokhre, S. G. Lokhre, Prakash R. Apte, Prakash R. Apte, R. Raajeev, R. Raajeev, R. Lal, R. Lal, } "Microresonator modified as magnetic sensor", Proc. SPIE 4176, Micromachined Devices and Components VI, (15 August 2000); doi: 10.1117/12.395645; https://doi.org/10.1117/12.395645
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