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18 August 2000 Microfluidics using the surface tension force in microscale
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Proceedings Volume 4177, Microfluidic Devices and Systems III; (2000) https://doi.org/10.1117/12.395667
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
This review summarizes our on-going effort to establish surface tension as a useful force for MEMS, especially microfluidics. Presented are several examples of using surface tension for microdevices. Droplet ejection mechanism using bubble check valve, pumping with sequential bubbles in microchannel, and electrostatic switching of liquid-metal droplet demonstrate how surface tension attenuates liquid movement so effectively in microscale. Liquid pumping using a bubble (or a droplet) under thermal gradient and electrically driving liquid-metal droplets in microchannel demonstrate that surface tension can even be used an an attractive driving force for microactuation.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chang-Jin Kim "Microfluidics using the surface tension force in microscale", Proc. SPIE 4177, Microfluidic Devices and Systems III, (18 August 2000); https://doi.org/10.1117/12.395667
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