22 August 2000 Electromechanical simulation of a large-aperture MOEMS Fabry-Perot tunable filter
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396504
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
We are developing as micro-machined electrostatically actuated Fabry-Perot tunable filter with a large clear aperture for application in high through-put wide-field imaging spectroscopy and lidar systems. In the first phase of this effort, we are developing key components based on coupled electro-mechanical simulations. In particular, the movable etalon plate design leverages high coating stress to yield a flat surface in drum- head tension over a large diameter. In this approach, the cylindrical silicon movable plate is back etched, resulting in an optically coated membrane that is suspended from a thick silicon support ring. Underestimating the interaction between the support ring, suspended membrane, and coating is critical to developing surfaces that are flat to within stringent etalon requirements. In this work, we present the simulations used to develop the movable plate, spring suspension system, and electrostatic actuation mechanism. We also present results form test of fabricated proof of concept components.
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Jonathan L. Kuhn, Jonathan L. Kuhn, Richard B. Barclay, Richard B. Barclay, Matthew A. Greenhouse, Matthew A. Greenhouse, David Brent Mott, David Brent Mott, Shobita Satyapal, Shobita Satyapal, } "Electromechanical simulation of a large-aperture MOEMS Fabry-Perot tunable filter", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396504; https://doi.org/10.1117/12.396504

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