22 August 2000 Integrated optical motion detection microsystem with programmable resolution
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396514
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
This integrated optical motion detection microsystem combines an analog programmable interpolator, digital drivers, differential analog front-end, signal monitoring outputs and contains an array of light sensitive cells with microstripe raster. Interpolating values are generated from orthogonal sinusoidal signals coming from illuminated integrated photosensors. Optical microsystem composes autocalibration on analog front-end to get proper interpolating signals. It consists of three symmetrical analog channels: sin, cosine and reference signal channel. Each channel combines a current gain stage operating as a fully differential current to voltage converter and thus guarantees the best phase relating between ordinary and inverted analog signals. Integrated analog buffers are used for outputting processed analog signals for monitoring purpose. The signal bandwidth of analog channels is designed to be large enough not to limit the system response and therefore maximize the useful signal range.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Anton Pletersek, Janez Trontelj, "Integrated optical motion detection microsystem with programmable resolution", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396514; https://doi.org/10.1117/12.396514

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