22 August 2000 Lucent Microstar micromirror array technology for large optical crossconnects
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396503
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Electrostatically actuated, 500micrometers diameter, Si surface micromachined 2-axis tilting micromirrors were designed and fabricated in a 2 structural + 1 interconnect layer polysilicon process. The mirrors are capable of large, continuous, controlled, DC tilt in any direction at moderate actuation voltages. The lowest-mode resonance frequency is sufficiently high to decouple from the ambient vibration noise and allow setting times of less than a few milliseconds. The Au- coated reflectors, suspended in gimbal mounts via torsional springs and bearings, are tilted by applying voltage to four electrically independent sets of fixed electrodes on the substrate. The electrodes and the springs are designed to optimize actuation voltages, resonance frequencies and the deflection range. To achieve the range, the mounts are lifted and fixed fifty microns above the substrate surface during the release process by a self-assembly mechanism powered by tailored residual stress in a separate metalization layer. Square arrays with 1 mm pitch containing independently addressable identical 16, 64 and 256 mirrors were fabricated and hermetically packaged. Based on these devices, fully functional, bitrate and wavelength independent, single stage, low insertion loss, single mode fiber optical crossconnect system are built.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Vladimir A. Aksyuk, Vladimir A. Aksyuk, Flavio Pardo, Flavio Pardo, Cristian A. Bolle, Cristian A. Bolle, Susanne Arney, Susanne Arney, C. Randy Giles, C. Randy Giles, David J. Bishop, David J. Bishop, } "Lucent Microstar micromirror array technology for large optical crossconnects", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396503; https://doi.org/10.1117/12.396503

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