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22 August 2000 MEMS feedback control using through-wafer optical device monitoring
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396494
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
As microelectromechanical systems (MEMS) become widely implemented, the application of closed-loop control methods to MEMS will lead to higher degrees of certainty and reliability of microelectromechanical operation in physically demanding environments. By including planar diffractive optics in these systems, an optical method of determining MEMS microstructure position that is fully decoupled from the means of mechanical actuation can be realized. This paper presents the result of initial research evaluating both open and closed-loop nonlinear proportional-integral-differential (PID) control routines using a 1.3 micrometers wavelength through-wafer free-space optical probe to obtain a position signal from a lateral comb resonator fabricated using Chronos Integrated Microsystems' Multi-User MEMS Process service. The implementation of sliding control methods is illustrated through simulation results, and the design considerations for a proposed integrated optical monitoring architecture is presented.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jeremy M. Dawson, Limin Wang, Jingdong Chen, Parviz F. Famouri, and Lawrence Anthony Hornak "MEMS feedback control using through-wafer optical device monitoring", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396494
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