MEMS/MEOMS: metrology and machine vision

Rick Conner

doi:10.1117/12.396495

22 August 2000 MEMS/MEOMS: metrology and machine vision

Rick Conner

Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396495
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

MEMS/MOEMS devices are ubiquitous and span a diverse set of markets and technology circles. Typically these devices are inserted into the final product with only a minimal amount of precision inspection. It is imperative that micro inspection and other micro packaging techniques are implemented at the front end of the manufacturing process to avoid costly yield problems. Metrology and Machine Vision can increase yields, reduce throughputs, and reduce downtime by minimizing reliance on human vision and manual dexterity. In this work we begin to define a systems view of the different types of MEMS/MOEMS devices and associated micro packaging and inspection techniques and issues.

Citation Download Citation

Rick Conner "MEMS/MEOMS: metrology and machine vision", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396495

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available