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22 August 2000 MOEMS pressure sensors for propulsion applications
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396511
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
Pressure sensors utilizing MEMS technology for fabrication of the sensing element, interrogation by fiber optics, and which are suitable for propulsion applications are described. Devices utilizing micro-opto-electro-mechanical systems (MOEMS) technology are often better suited for harsh environments than electrically interrogated MEMS devices, so with sturdy packaging these optical devices may be useful to many propulsion applications. MOEMS pressure sensors can also be incorporated into arrays for detailed spatial characterization along with inherent high speed temporal characterization. Such characterization is expected to be very useful for propulsion systems. This presentation will first review optical-MEMS pressure sensor configurations. We will then concentrate on configurations most suitable for high speed applications in harsh environments. Examples of experimental results for static pressure test as well as for dynamic pressure test carried out in a shock tube demonstrating good linearity, sensitivity and time response will then be presented. Hybrid and monolithic array configurations will be presented. A discussion of the use of wavelength division multiplexing for efficient accessing of array elements will also be included.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Joseph T. Boyd, Samhita Dasgupta, and Howard E. Jackson "MOEMS pressure sensors for propulsion applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396511
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