22 August 2000 Metrology for laser-structured microdevices by CCD-camera-based vision systems
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396489
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Recent developments in the are of micromachining and microfabrication are accelerating commercial awareness of microstructures. Product applications ranging form automotive and medical devices to industrial, chemical and consumer products show the necessity of adequate fabrication methods for microstructures. These fabrication methods include high resolution measurement technologies. Images of the machined area, recorded via videography by a CCD-camera based computer vision system are evaluated to obtain the two dimensions of the microstructured devices. Height measurement is performed by automatically focusing on two different levels of the workpiece. The achieved accuracy of the measurement data is evaluated. During structuring of microdevices an autofocus system is used to control the removal process by laser radiation to obtain the desired geometry. The mathematical algorithms used by the vision system to guide the focus of the CCD-camera are discussed. The designed measurement system is tested by microstructuring of hard metals and ceramics with short pulse laser radiation.
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Andreas Ostlender, Andreas Ostlender, Udo Puetz, Udo Puetz, Ernst-Wolfgang Kreutz, Ernst-Wolfgang Kreutz, } "Metrology for laser-structured microdevices by CCD-camera-based vision systems", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396489; https://doi.org/10.1117/12.396489

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