22 August 2000 Micromirrors and micromirror arrays for scanning applications
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396505
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
The main focus of this contribution will be the description of already realized applications of micromirrors and micromirror arrays and future opportunities. As an example image projection and environmental monitoring will be discussed. The micro scanning elements where fabricated by using monocrystalline silicon and are convenient for continuous scanning with working frequencies between several 100 Hz up to 100 kHz.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Thomas Gessner, Thomas Gessner, Steffen Kurth, Steffen Kurth, Christian Kaufmann, Christian Kaufmann, Joachim Markert, Joachim Markert, Andreas Ehrlich, Andreas Ehrlich, Wolfram Doetzel, Wolfram Doetzel, } "Micromirrors and micromirror arrays for scanning applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396505; https://doi.org/10.1117/12.396505

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