22 August 2000 Optical 2x2 switch matrix with electromechanical micromotors
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396516
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
In the rapidly developing optical telecommunication domain optical switch arrays lend themselves to the complex switching tasks. Therefore a prototype of an all-optical switch matrix with 2 in- and output channels has been developed in LIGA-technique. However, with the presented concept also switch arrays with more channels can be realized. The switch array has been designed for the telecommunication wavelength 1.55 micrometers and for single mode application. The optical signals are detoured inside a microoptical bench by means of moveable micromirrors. For the collimation of the light beams spherical glass lense are used. Fibers and lenses are passively aligned with mounts and stops in the LIGA-structured microoptical bench. The mirrors are placed by electrostatic wobble motors. Defined end positions for the micromirrors are realized by use of electromechanical dead stops. In order to avoid angular displacements of the deflected light beams double mirrors are used. The presented prototype features two 2 by 2 switch matrices on a 10 by 10 mm2 ceramic substrate with six micromotors with 1.7 mm diameter. Switching times down to 30 ms have been achieved. The crosstalk between different channels is 90 dB and first measurements of the insertion loss with passive alignment of the optical elements yielded 7 dB. Further work to reduce the insertion loss by optimization of the alignment features are under way.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Antonio Ruzzu, Antonio Ruzzu, Dirk Haller, Dirk Haller, Juergen Mohr, Juergen Mohr, Ulrike Wallrabe, Ulrike Wallrabe, "Optical 2x2 switch matrix with electromechanical micromotors", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396516; https://doi.org/10.1117/12.396516

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