22 August 2000 Pivoting micromirror designs for large orientation angles
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396480
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
This paper describes mechanical designed concepts for a class of pivoting micromirrors that permit relatively large angles of orientation to be obtained when configured in large arrays. Micromirror arrays can be utilized in a variety of applications ranging from optical switching to beam-front correction in a variety of technologies. This particular work is concerned with silicon surface micromachining. The multi-layer polysilicon surface micromachined process developed at Sandia National Laboratories is used to fabricate micromirror arrays that consists of capacitive electrode pairs which are used to electrostatically actuator mirrors to their desired positions and suitable elastic suspensions which support the 2 micrometers thick mirror structures. The designs described have been fabricated and successfully operated.
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Ernest J. Garcia, Ernest J. Garcia, } "Pivoting micromirror designs for large orientation angles", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396480; https://doi.org/10.1117/12.396480
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