22 August 2000 Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396499
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
Two monolithically integrated frequency tuners have been analyzed, designed and fabricated. The potential applications for WDM have also been studied. The frequency tuners use 3D micromirrors integrated with single-mode Fabry-Perot laser diodes and anti-reflection coated optical fibers. The difference between the two frequency tuners is that one uses the movable 3D micromirror driven by comb-drive to change the external cavity length, and the other uses the rotatable 3D micromirror driven by thermal-actuator to change the external feedback strength. For the frequency tuner that uses movable 3D micromirror, a wavelength tunability of 16 nm is obtained using 3V driving voltage. As for the frequency tuner that uses rotatable 3D micromirror, a wavelength tunability of 7nm is obtained while using 10mA driving current.
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Xuming Zhang, Xuming Zhang, F. Chollet, F. Chollet, Fook Siong Chau, Fook Siong Chau, Chenggen Quan, Chenggen Quan, Ai Qun Liu, Ai Qun Liu, } "Polysilicon micromachining 3D mirror integrated frequency tuner for WDM applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); doi: 10.1117/12.396499; https://doi.org/10.1117/12.396499
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