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22 August 2000 Thermally actuated microprojector for optical display applications
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Proceedings Volume 4178, MOEMS and Miniaturized Systems; (2000) https://doi.org/10.1117/12.396485
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
A dual-axis, raster-scanning laser display based on a monolithic micromachined scanning mirror is presented. The scanner consists of a micromirror located at the end of a thermally actuated bimorph beam. The novelty of the device is that an 'L'-shape cantilever, which is simultaneously excited at non-resonance and at resonance, gives the two orthogonal angular motions. The high sensitivity of the thermal bimorph actuator allows a low frequency movement of the scanner in one direction. The second orthogonal scanning direction is a resonance torsion motion. The micro-device has a raster scanning frequency varying from 1000 Hz to 5000 Hz depending on the geometry, and if combined with a 50 Hz frame signal, has a definition of up to 100 lines. Mechanical scan amplitudes over 15 degrees in two orthogonal directions have been achieved. The typical power consumption is 5 mW. In this paper, the resolution of the scanner is discussed which is limited by the diffraction from the 500 micrometers to 300 micrometers mirror and its flatness. The performance of the new device is demonstrated by projecting a 2D image using a modulated laser diode and the two orthogonal mirror deflections.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Sandra Schweizer, Peter Cousseau, Sebastien Schiesser, Gerhard Lammel, Sam Calmes, and Philippe Renaud "Thermally actuated microprojector for optical display applications", Proc. SPIE 4178, MOEMS and Miniaturized Systems, (22 August 2000); https://doi.org/10.1117/12.396485
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