Approach to higher reliability in 3D micromechanisms

Narito Shibaike; Hiroyuki Takeuchi; Kunihiko Nakamura; Norisato Shimizu

doi:10.1117/12.395688

18 August 2000 Approach to higher reliability in 3D micromechanisms

Narito Shibaike, Hiroyuki Takeuchi, Kunihiko Nakamura, Norisato Shimizu

Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000) https://doi.org/10.1117/12.395688
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

A micro-reducer characterized in its small size, high resolution ration and high reliability has been developed to achieve sufficient performance after 5,000,000 high-speed rotations¹. A 3K-type mechanical paradox planetary gear reduction system was chosen in mechanical design. The size of a reducing part is 3 x 3.8 x 1.3 mm, and its reduction ratio is about 200. The module of the fine gears is 0.03. Alloy tool steel and WC-Ni-Cr super hard alloy were selected for the materials. The mechanical, thermal and environmental attributes were investigated by the properties of the materials suitable for micro fabrication on the specific strength and resistance to thermal distortion as the functional performance, and energy content of the material as the environmental impact. Micro-EDM process was optimized to accurately shape such a microscopic components. Surface modification by DLC, CrN, and MoS+-2) thin film was applied by rotating deposition technique to improve the surface-based attributes such as hardness, friction coefficient and resistance to wear. Several kinds of lubrication and bearing systems were evaluated to understand their internal energy dissipation and durability. This report presents such a synthetic approach for the micro-reducer to be steady, efficient and durable.

Citation Download Citation

Narito Shibaike, Hiroyuki Takeuchi, Kunihiko Nakamura, and Norisato Shimizu "Approach to higher reliability in 3D micromechanisms", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); https://doi.org/10.1117/12.395688

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