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18 August 2000 Fabrication of micro-optical components by high-precision embossing
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Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000)
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Optical components, such as miniature spectrometer gratings working in the infrared range for environmental monitoring or physical analytics, contribute appeciably to the price of Micro Electro Opto Mechanical Systems (MOEMS). These optical components could be a part of a miniature functional package produced with an alternative fabrication technology based on cold forming metals. The cost-efficient fabrication of these components, for example by implementation of forming technology, appears promising. With this technology, high quality embossing of optical structures for high precision requirements in a batch process is possible. In this way the system costs can be reduced. In this paper aluminum forming by cold embossed grating for the fabrication of gratings was investigated. Experiments with different geometries of the embossed grating were carried out. The quality of the embossed structures is primarily determined by the precision and surface quality of the die. Therefore we used a single crystalline silicon tool made by etching as a die. Quality criteria for the review of the formed optical grating were the geometry of surfaces and the surface roughness as well as optical properties of the total structure.
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Thomas Otto, Andreas Schubert, Juliana Boehm, and Thomas Gessner "Fabrication of micro-optical components by high-precision embossing", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000);

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