18 August 2000 Fabrication of microlens arrays in CaF2 by ion milling
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Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000) https://doi.org/10.1117/12.395680
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
Calcium Fluoride microlens arrays have been produced with the help of an ion milling transfer of photoresist lenses which have been fabricated by two different techniques (i) by a melting resist technique and (ii) gray scale lithography. Major technical problems connected with the ion milling transfer of the photoresist lenses in the CaF2 material are surface roughness enhancement and variation of the lens shape. We studied the ion-induced decomposition of CaF2 and the surface roughness equatio in dependence on different milling conditions. For the microlens patter transfer the ratio of etching rates of the photoresist and the CaF2 have been adjusted by gas admixture of nitrogen to the Ar sputtering gas. The angle dependence of the etching rates leads also to a changing of the lens profile. The effect of ion beam induced surface roughness and the accuracy of the transfer process is discussed.
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Dieter Flamm, Dieter Flamm, Axel Schindler, Axel Schindler, Torsten Harzendorf, Torsten Harzendorf, Ernst-Bernhard Kley, Ernst-Bernhard Kley, } "Fabrication of microlens arrays in CaF2 by ion milling", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); doi: 10.1117/12.395680; https://doi.org/10.1117/12.395680
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