Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann; Terunobu Akiyama; Danick Briand; Sebastien Gautsch; Olivier T. Guenat; Benedikt Guldimann; Philippe Luginbuhl; Cornel Marxer; Urs Staufer; Bart van der Schoot; Nico F. de Rooij

doi:10.1117/12.395691

18 August 2000 Microsystems for diverse applications using recently developed microfabrication techniques

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier T. Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, Nico F. de Rooij

Author Affiliations +

Proceedings Volume 4179, Micromachining Technology for Micro-Optics; (2000) https://doi.org/10.1117/12.395691
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States

Abstract

The continuous progress in micro- and nano-system technologies has allowed the successful development of many innovative products in process control, environmental monitoring, healthcare, automotive and aerospace as well as information processing systems. In this paper on overview will be given of current progress in micro- and nanofabrication process technologies, such as deep reactive ion etching, micro-electro discharge machining, thick photoresistant processing and plating. The availibility of these micro- and nanofabrication processes will be illustrated with examples of new generations of silicon-based sensors, actuators and Microsystems with a particular emphasis on real applications of these components and systems.

Citation Download Citation

Laurent Dellmann, Terunobu Akiyama, Danick Briand, Sebastien Gautsch, Olivier T. Guenat, Benedikt Guldimann, Philippe Luginbuhl, Cornel Marxer, Urs Staufer, Bart van der Schoot, and Nico F. de Rooij "Microsystems for diverse applications using recently developed microfabrication techniques", Proc. SPIE 4179, Micromachining Technology for Micro-Optics, (18 August 2000); https://doi.org/10.1117/12.395691

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE