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Characterization of Kovar-Pyrex anodically bonded samples: a new packaging approach for MEMS devices
Electrical and environmental reliability characterization of surface-micromachined MEMS polysilicon test structures
Anodic oxidation and reliability of MEMS polysilicon electrodes at high relative humidity and high voltages
Diagnosis of microcrack initiation and estimation fracture toughness for micromachined silicon comb device with prenotch actuated by electrostatic force