10 August 2000 Effect of storage life and drive signals on the reliability of the Sandia Microengine
Author Affiliations +
Proceedings Volume 4180, MEMS Reliability for Critical Applications; (2000) https://doi.org/10.1117/12.395701
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
In this study, the parameters affecting operational and nonoperational reliability of the Sandia Microengine were investigated. It was found that using a non-outgassing die attach material greatly improves storage life. The minimum force required to drive the microengines initially decreased from a much higher voltage to settle in at around 1250 V2 for all devices tested. Drive signal parameters were optimzed for individual engines and the resulting device lifetimes were found to be marginally better that when average values were used (1.2x106 cycles compared to 1.0x106 cycles). There was no correlation between the value of the lumped parameter kr/a and lifetime found, however the longest living engines used a kr/a of around 1000 V2. ues. Optimized drive signal lifetimes were found to be a factor of two higher than when sinewave drive signals were used (5x105 compared to 1.2x106),indicating the advantage of using optimizzed drive signals, but not the two order of magnitude in lifetime that was desired.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Chad B. O'Neal, Ajay P. Malshe, William P. Eaton, "Effect of storage life and drive signals on the reliability of the Sandia Microengine", Proc. SPIE 4180, MEMS Reliability for Critical Applications, (10 August 2000); doi: 10.1117/12.395701; https://doi.org/10.1117/12.395701
PROCEEDINGS
10 PAGES


SHARE
Back to Top