10 August 2000 MEMS/MOEMS for lightwave networks: Can little machines make it big?
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Proceedings Volume 4180, MEMS Reliability for Critical Applications; (2000) https://doi.org/10.1117/12.395704
Event: Micromachining and Microfabrication, 2000, Santa Clara, CA, United States
Abstract
Silicon micromechanics in an emerging field which is beginning to impact almost every area of science and technology. In areas as diverse as the chemical, automotive, aeronautical, cellular and optical communication industries, Silicon micromachines are becoming the solution of choice for many problems. In this paper we will describe what they are, how they are built, and show how they have the potential to revolutionize lightwave systems. Devices such as optical switches, variable attenuators, active equalizers, add/drop multiplexers, optical crossconnects, gain tilt equalizers, data transmitters and many others are beginning to find ubiquitous application in advanced lightwave systems. We will show examples of these devices and describe some of the challenges in attacking the billions of dollars in addressable markets for this technology.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
David J. Bishop, David J. Bishop, Vladimir A. Aksyuk, Vladimir A. Aksyuk, Cristian A. Bolle, Cristian A. Bolle, C. Randy Giles, C. Randy Giles, Flavio Pardo, Flavio Pardo, Jim A. Walker, Jim A. Walker, } "MEMS/MOEMS for lightwave networks: Can little machines make it big?", Proc. SPIE 4180, MEMS Reliability for Critical Applications, (10 August 2000); doi: 10.1117/12.395704; https://doi.org/10.1117/12.395704
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