18 August 2000 Evolution of semiconductor process technology
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Abstract
For the past years the number of transistors integrated into a single chip has doubled every one to two years; that trend has not slowed down. Actually, it has accelerated every time we hit a technology barrier point. New developments in process and equipment technology have enabled us to follow Moore's law to reduce the average dimension of the physical features of integrated circuits from 10micrometers down to .1micrometers . What will be the limit be. 0.01micrometers and 120 inches. We will not reach it within this decade.
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Trung Tri Doan, Trung Tri Doan, "Evolution of semiconductor process technology", Proc. SPIE 4181, Challenges in Process Integration and Device Technology, (18 August 2000); doi: 10.1117/12.395712; https://doi.org/10.1117/12.395712
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