Influence of preannealing on residual stresses in boron-doped LPCVD polysilicon film

Longqing Chen; Jianmin Miao

doi:10.1117/12.410102

23 August 2000 Influence of preannealing on residual stresses in boron-doped LPCVD polysilicon film

Longqing Chen, Jianmin Miao

Proceedings Volume 4182, Process Control and Diagnostics; (2000) https://doi.org/10.1117/12.410102
Event: Microelectronic Manufacturing, 2000, Santa Clara, CA, United States

Abstract

An investigation of effects of variables of LPCVD process and subsequent processes on residual stresses in highly doped polysilicon film is carried out. A pre-annealing process for as- deposited polysilicon film was introduced before boron doping in order to be able to change magnitude of residual stress in a larger range. The influence of the pre-annealing on the residual stresses in boron doped polysilicon film was studied. The test results show that boron doping process induces significant residual stress only in LPCVD polysilicon films which are deposited at lower process temperature. There will not be significant doping stress in the polysilicon films if the deposition temperature is higher than 620 degrees C or pre- annealing temperature before the doping is higher than 1000 degrees C. The larger change range of the film stress can be obtained by to change pre-annealing temperature before doping. This method will be useful in the stress control of a multi-layer diaphragm structure.

Citation Download Citation

Longqing Chen and Jianmin Miao "Influence of preannealing on residual stresses in boron-doped LPCVD polysilicon film", Proc. SPIE 4182, Process Control and Diagnostics, (23 August 2000); https://doi.org/10.1117/12.410102

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available