25 January 2001 Ablation of BN ceramics by femtosecond and picosecond laser pulses
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Proceedings Volume 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference; (2001) https://doi.org/10.1117/12.414006
Event: XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, 2000, Florence, Italy
Abstract
Ablation of cubic-boron nitride (c-BN) and hexagonal-boron nitride (h-BN) ceramics irradiated with Ti:sapphire laser (110fs) and Nd:YAG laser (100ps) pulses is studied. The relationship between ablation rate and laser fluence for the Nd:YAG laser shows a semi-logarithmic formula for c-BN and h-BN, and also the ablation rate of h-BN by Ti:sapphire laser is observed similar to that by the Nd:YAG laser, except that of c-BN. It is found that there are two different regimes of ablation rate for c-BN as same as metals by Ti:sapphire laser ablation. In addition, it is found from XPS analysis and SEM observation that the area ablated with Ti:sapphire laser shows the BN surface unchanged and has no evidence of melting. These results are different from the ablated surface with the Nd:YAG laser. In short, the microscopic processing of BN ceramics using femtosecond Ti:sapphire laser shows little heat effect and keeps the chemical composition of the ablated surface unchanged.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yoichi Hirayama, Yoichi Hirayama, Minoru Obara, Minoru Obara, } "Ablation of BN ceramics by femtosecond and picosecond laser pulses", Proc. SPIE 4184, XIII International Symposium on Gas Flow and Chemical Lasers and High-Power Laser Conference, (25 January 2001); doi: 10.1117/12.414006; https://doi.org/10.1117/12.414006
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