Some aspect of MEMS technology

Evgenij N. Pyatishev; Mihail S. Lurie; Irina V. Popova

doi:10.1117/12.394145

2 August 2000 Some aspect of MEMS technology

Evgenij N. Pyatishev, Mihail S. Lurie, Irina V. Popova

Proceedings Volume 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics; (2000) https://doi.org/10.1117/12.394145
Event: Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, 1999, Moscow, Russian Federation

Abstract

The paper considers differences between basic operations of the microelectromechanical systems (MEMS) and microelectronic manufacturing processes. The design and fabrication of the vibration microgyroscope are discussed to exemplify the inadequacy of standard microelectronic techniques for needs of MEM technologies and necessity of developing new basic technologies.

Citation Download Citation

Evgenij N. Pyatishev, Mihail S. Lurie, and Irina V. Popova "Some aspect of MEMS technology", Proc. SPIE 4187, Fourth All-Russian Seminar on Problems of Theoretical and Applied Electron Optics, (2 August 2000); https://doi.org/10.1117/12.394145

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