12 As the pressure increases to deliver vision products with faster speed while inspection higher resolution at lower cost, the area scanning vision inspection system can be one of the good solutions. To inspect large area with high resolution, the conventional vision system requires moving either camera or the target, therefore, the system suffers low speed and high cost due to the requirements of mechanical moving system or higher resolution camera. Because there are only tiny mirror angle movements required to change the field of view, the XY mirror controlled area scanning vision system is able to capture random area images with high speed. Elimination of external precise moving mechanism is another benefit of the mirror control. The image distortion due to the lens and the mirror system shall be automatically compensated right after each image captured so that the absolute coordination can be calculated in real- time. Motorized focusing system is used for the large area inspection, so that the proper focusing achieved for the variable working distance between lens and targets by the synchronization to the mirror scanning system. By using XY mirror controlled area scanning vision inspection system, fast and economic system can be integrated while no vibration induced and smaller space required. This paper describes the principle of the area scanning method, optical effects of the scanning, position calibration method, inspection flows and some of implementation results.