12 February 2001 Micromotion measurement system for millistructure using diffraction grating
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Proceedings Volume 4190, Optomechatronic Systems; (2001) https://doi.org/10.1117/12.417235
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States
Abstract
12 Current technological development toward miniaturization requires smaller components. These components usually generate complex multi-DOF motions other than simple 1-DOF mission. Therefore it is essential to develop measurement methodology for 6-DOF motions. In this paper, a new 6-DOF measurement system for milli-structure is presented. This methodology basically employs the Optical Beam Deflection Method with a diffraction grating. A laser beam is emitted toward the diffraction grating which could be attached on the surface of a milli-structure and the incident ray is diffracted in several directions. Among these diffracted beams, 0th and +/- 1th order diffracted rays are detected by 4 Quadrant Photodiodes. From coordinate values from each detector, we can get information for 6-DOF motions with linearization method. Required resolutions for milli- structure measurement are sub-micrometer in translation and arcsec in rotation. Experimental results indicate that proposed system has possibility to satisfy this requirement. This method can be applied to measurement of various applications such as arm head of HDD, micro positioning stages.
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Eui Won Bae, Eui Won Bae, Jong-Ahn Kim, Jong-Ahn Kim, Soo Hyun Kim, Soo Hyun Kim, Yoon Keun Kwak, Yoon Keun Kwak, } "Micromotion measurement system for millistructure using diffraction grating", Proc. SPIE 4190, Optomechatronic Systems, (12 February 2001); doi: 10.1117/12.417235; https://doi.org/10.1117/12.417235
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