11 October 2000 Micro/nanofactory: concept and state of the art
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Proceedings Volume 4194, Microrobotics and Microassembly II; (2000) https://doi.org/10.1117/12.403687
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States
A Microfactory is a set of cooperating micro-machines dedicated to the production of Microsystems in small to medium quantities. This paper describes the Microfactory concept currently developed at the Institut de Systemes Robotiques (ISR). A state of the art in this domain is presented. Several novel designs on micro-positioning systems are discussed. Emphasis is put on piezo-actuators with nanometer resolution and large workspaces (few cm3). Finally, our vision for the future trends in the field of Microfactory is briefly introduced.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jean-Marc Breguet, Jean-Marc Breguet, Carl Schmitt, Carl Schmitt, Reymond Clavel, Reymond Clavel, } "Micro/nanofactory: concept and state of the art", Proc. SPIE 4194, Microrobotics and Microassembly II, (11 October 2000); doi: 10.1117/12.403687; https://doi.org/10.1117/12.403687

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