6 March 2001 Design flow for MOEMS
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Proceedings Volume 4198, Optomechanical Engineering 2000; (2001); doi: 10.1117/12.417352
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States
Abstract
As MOEMS transition from laboratory curiosities to production products inserted into telecommunication systems, a complete design flow is necessary for rapid product development to minimize time-to-market. We present a MOEMS design flow that provides efficient top-down design and accurate bottom-up verification. The detailed MOEMS device design is addressed along with an integrated capability for including other optical elements, packaging, opto- electronics, as well as drive and control electronics.
© (2001) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Arthur S. Morris, Stephen F. Bart, Derek Kane, Gunar Lorenz, Vladimir L. Rabinovich, "Design flow for MOEMS", Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); doi: 10.1117/12.417352; https://doi.org/10.1117/12.417352
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KEYWORDS
Microopto electromechanical systems

Mirrors

Sensors

3D modeling

Gaussian beams

Control systems

Device simulation

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