Nanometer-class structural actuators and instruments for subnanometer metrology

Alson E. Hatheway

doi:10.1117/12.417350

6 March 2001 Nanometer-class structural actuators and instruments for subnanometer metrology

Alson E. Hatheway

Proceedings Volume 4198, Optomechanical Engineering 2000; (2001) https://doi.org/10.1117/12.417350
Event: Intelligent Systems and Smart Manufacturing, 2000, Boston, MA, United States

Abstract

The author has recently completed the development of a series of structural actuators for supporting the segments of the primary mirror in various configurations of NASA's Next Generation Space Telescope. Separately, the author has been developing a `calibrated displacement actuator' for use in calibrating metrology instruments used to make nanometer- scale measurements. This paper reports on the performance of both the calibrated displacement actuator called `HECTOR- 100^tm' and the Rubicon^tm structural actuator. It also discusses the benefits of incorporating a HECTOR-100- type actuator as a hyperfine third stage in a structural actuator for controlling mirror surfaces for very high resolution imaging as possibly in the visible or UV portions of the spectrum.

Citation Download Citation

Alson E. Hatheway "Nanometer-class structural actuators and instruments for subnanometer metrology", Proc. SPIE 4198, Optomechanical Engineering 2000, (6 March 2001); https://doi.org/10.1117/12.417350

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