Development of miniature electromechanical pressure sensor arrays (MEMPSA) for high-resolution thermospheric and mesospheric neutral wind measurement

Robert C. White; Thomas Long; Thomas W. Schneider

doi:10.1117/12.417458

26 February 2001 Development of miniature electromechanical pressure sensor arrays (MEMPSA) for high-resolution thermospheric and mesospheric neutral wind measurement

Robert C. White, Thomas Long, Thomas W. Schneider

Author Affiliations +

Proceedings Volume 4205, Advanced Environmental and Chemical Sensing Technology; (2001) https://doi.org/10.1117/12.417458
Event: Environmental and Industrial Sensing, 2000, Boston, MA, United States

Abstract

We have developed a design for a neutral wind instrument for the upper atmosphere based on arrays of miniature pressure sensors. The elements of the array are tunnel displacement transducers (TDT's). We have characterized the TDT, a microelectomechanical system (MEMS), and evaluated TDT capabilities for the determination of pressure within a 2—D array. This is an approach for direct measurement of neutral winds. The sensitivity of the TDT is critical for this application. The output signal of a TDT is the bias voltage dependent tunneling current. This is a differential signal in a force balanced TDT due to the fact that a restoring force is applied to the diaphragm in order to restore the tunneling current to a fixed value. We have fabricated and assembled a custom test apparatus for the TDT based sensor arrays. We have demonstrated simultaneous collection of data from 4 TDT's that were hybrid assemblies of monolithic 2-TDT arrays. Results showed that correlation of the tunneling signal to the actual bias voltage difference required to balance the displacement force gives reasonable information for a pressure sensor and defines the required signal processing.

Citation Download Citation

Robert C. White, Thomas Long, and Thomas W. Schneider "Development of miniature electromechanical pressure sensor arrays (MEMPSA) for high-resolution thermospheric and mesospheric neutral wind measurement", Proc. SPIE 4205, Advanced Environmental and Chemical Sensing Technology, (26 February 2001); https://doi.org/10.1117/12.417458

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