High-performance miniature integrated infrared spectrometers for industrial and biochemical sensing

Roman V. Kruzelecky; Asoke Kumar Ghosh

doi:10.1117/12.417457

26 February 2001 High-performance miniature integrated infrared spectrometers for industrial and biochemical sensing

Roman V. Kruzelecky, Asoke Kumar Ghosh

Proceedings Volume 4205, Advanced Environmental and Chemical Sensing Technology; (2001) https://doi.org/10.1117/12.417457
Event: Environmental and Industrial Sensing, 2000, Boston, MA, United States

Abstract

High-resolution, miniature integrated spectrometers have been constructed for the NIR and MIR spectral ranges, based on MPBT's proprietary IOSPEC technology. Advanced slab-waveguide integrated optics have been employed to extend the performance of the miniature IR spectrometers to rival that of much larger FT-JR spectrometers. Monolithic integration of the miniature spectrometer, input optics and detector array provides a very compact and robust package that is suitable for industrial and field environments. Despite the compact size of the spectrometers, resolutions of 4 to 8 cm-1 are achievable over dedicated spectral ranges (2000 to 4000 nm, respectively). These spectrometers are coupled to 256channel linear detector arrays controlled by software based on Visual C++ to provide rapid spectral acquisition and analysis. This technology facilitates on-line infrared spectral analysis of an industrial or biochemical process at scan rates exceeding 200 spectra/sec. Since the spectral data is measured directly, significantly less data processing is required than for FT-JR techniques, allowing more CPU time for spectral identification and analysis. Multi-channel, time-resolved spectral measurements permit the study of the intermediate steps in a process or reaction. This paper discusses recent advances in the performance of the miniature integrated spectrometers. New detector geometries and data processing techniques have facilitated a substantial improvement in the overall system SNR over that feasible with typical sequentially-scanned detector arrays. Preliminary experimental transmittance spectra of optical filters and plastics are presented.

Citation Download Citation

Roman V. Kruzelecky and Asoke Kumar Ghosh "High-performance miniature integrated infrared spectrometers for industrial and biochemical sensing", Proc. SPIE 4205, Advanced Environmental and Chemical Sensing Technology, (26 February 2001); https://doi.org/10.1117/12.417457

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