3 October 2000 Novel method for two-coordinate slope test with fiber optic sensor
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Proceedings Volume 4220, Advanced Photonic Sensors: Technology and Applications; (2000) https://doi.org/10.1117/12.401714
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
The demand for incorporating sensor technology into the production environment is being driven by the increasing need to minimize manufacturing costs whilst simultaneously producing parts of high quality. A novel simple fiber-optic sensor based on the light beam reflection principle was presented for slopes measurement. With the optical probe arrangement like a wheel, the emitting single-mode finer (SMF) as the axle and eight receiving multi-mode fibers (MMF) as the spoke, the sensor can detect the surface slopes with two- coordinate as well as the offsets of displacement measurement can be compensated. The mathematical models were established based on the ABCD Law of Gaussian beam transmission matrix optics and in the case of paraxial approximation. Simulations were performed for verifying the proposed idea, and the preliminary experimental results were obtained and its performance coincided with the simulation. The resolution of slopes test was better than 0.02 degree over +/- 30 degree, and the displacement measurement vertical resolution stayed within 0.1 micron, the lateral resolution can reach 8 micron. And with the further development of this method, it can be absolutely used in complex surface measurement in Reverse Engineering.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Yong Zhao, Yong Zhao, Pengsheng Li, Pengsheng Li, Zhaobang Pu, Zhaobang Pu, Zhengnai Sun, Zhengnai Sun, } "Novel method for two-coordinate slope test with fiber optic sensor", Proc. SPIE 4220, Advanced Photonic Sensors: Technology and Applications, (3 October 2000); doi: 10.1117/12.401714; https://doi.org/10.1117/12.401714
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