Performance of optically excited silicon microresonators with coating film

Yue-Ming Liu; Junhua Liu; Changchun Zhu

doi:10.1117/12.401719

3 October 2000 Performance of optically excited silicon microresonators with coating film

Yue-Ming Liu, Junhua Liu, Changchun Zhu

Proceedings Volume 4220, Advanced Photonic Sensors: Technology and Applications; (2000) https://doi.org/10.1117/12.401719
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

Based on the theoretical analysis relating to the Heat Conducting Theory, the Thermal Strain Theory and the Mechanical Vibration Theory, the performance of the silicon microresonator with coating film are studied. The new models of resonant frequency and amplitude are presented by taking the coating film effect into full account, and the comparison between the theoretical values and experimental values shows that the models are more accurate.

Citation Download Citation

Yue-Ming Liu, Junhua Liu, and Changchun Zhu "Performance of optically excited silicon microresonators with coating film", Proc. SPIE 4220, Advanced Photonic Sensors: Technology and Applications, (3 October 2000); https://doi.org/10.1117/12.401719

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
5 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Resonators

Coating

Silicon

Silicon films

Microresonators

Sensors

Data modeling

Show All Keywords

Keywords/Phrases

Search In:

Publication Years