Paper
9 October 2000 Nondestructive survey of a buried surface and interface structure by x-ray scattering
Wenjun Ma, J. E. Macdonald, Gang Jia
Author Affiliations +
Proceedings Volume 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications; (2000) https://doi.org/10.1117/12.402614
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
X-ray scattering as a nondestructive probe was used in studying surface and interface structure. Two monolayers InAs was found to be existence between InGaAs and InP by simulating scattering data. The interfacial effects on peak-separation of substrate to epilayer and on layer thickness were simulated.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Wenjun Ma, J. E. Macdonald, and Gang Jia "Nondestructive survey of a buried surface and interface structure by x-ray scattering", Proc. SPIE 4221, Optical Measurement and Nondestructive Testing: Techniques and Applications, (9 October 2000); https://doi.org/10.1117/12.402614
Advertisement
Advertisement
RIGHTS & PERMISSIONS
Get copyright permission  Get copyright permission on Copyright Marketplace
KEYWORDS
Scattering

Interfaces

X-rays

Indium arsenide

Nondestructive evaluation

Reflection

Crystals

Back to Top