Development of research on super-precision measurement techniques for circle and cylindrical contour

Jiubin Tan; Weiqian Zhao; Wenguo Yang

doi:10.1117/12.403871

10 October 2000 Development of research on super-precision measurement techniques for circle and cylindrical contour

Jiubin Tan, Weiqian Zhao, Wenguo Yang

Author Affiliations +

Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403871
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

At the beginning, it is presented that several theoretical and key technique problems among super-precision and nanometer measurement for circle and cylindrical contour, including: periodic reappearance of straight line datum movement; harmonic suppression in the measurement for circle contour; datum error's recognition and separation in the measurement for cylindrical contour; the problem of information integrality in the measurement for cylindrical contour. Then it is mainly introduced that the development research of super-precision measurement for circle and cylindrical contour, including: error separation technology with non-harmonic suppression; laser monitoring technology of straight line datum movement; error separation technology among datums, etc. Finally, give a vista of new promising measurement technique, such as the contour measurement based on confocal microscopy, optical measuring techniques with non-datums and so on.

Citation Download Citation

Jiubin Tan, Weiqian Zhao, and Wenguo Yang "Development of research on super-precision measurement techniques for circle and cylindrical contour", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); https://doi.org/10.1117/12.403871

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