10 October 2000 Development of research on super-precision measurement techniques for circle and cylindrical contour
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Proceedings Volume 4222, Process Control and Inspection for Industry; (2000) https://doi.org/10.1117/12.403871
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China
Abstract
At the beginning, it is presented that several theoretical and key technique problems among super-precision and nanometer measurement for circle and cylindrical contour, including: periodic reappearance of straight line datum movement; harmonic suppression in the measurement for circle contour; datum error's recognition and separation in the measurement for cylindrical contour; the problem of information integrality in the measurement for cylindrical contour. Then it is mainly introduced that the development research of super-precision measurement for circle and cylindrical contour, including: error separation technology with non-harmonic suppression; laser monitoring technology of straight line datum movement; error separation technology among datums, etc. Finally, give a vista of new promising measurement technique, such as the contour measurement based on confocal microscopy, optical measuring techniques with non-datums and so on.
© (2000) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Jiubin Tan, Weiqian Zhao, Wenguo Yang, "Development of research on super-precision measurement techniques for circle and cylindrical contour", Proc. SPIE 4222, Process Control and Inspection for Industry, (10 October 2000); doi: 10.1117/12.403871; https://doi.org/10.1117/12.403871
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