Design of fly's eye homogenizer for excimer laser micromachining

Tiechuan Zuo; Tao Chen; Chengde Li

doi:10.1117/12.401749

5 October 2000 Design of fly's eye homogenizer for excimer laser micromachining

Tiechuan Zuo, Tao Chen, Chengde Li

Proceedings Volume 4223, Instruments for Optics and Optoelectronic Inspection and Control; (2000) https://doi.org/10.1117/12.401749
Event: Optics and Optoelectronic Inspection and Control: Techniques, Applications, and Instruments, 2000, Beijing, China

Abstract

In this paper, the design of a fly's eye homogenizer for excimer laser micro-machining is described. The homogenizer has high performance in averaging the strong intensity fluctuations of the incident excimer laser beam and low transmitting loss. The dimension of the output beam can be adjusted continuously.

Citation Download Citation

Tiechuan Zuo, Tao Chen, and Chengde Li "Design of fly's eye homogenizer for excimer laser micromachining", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); https://doi.org/10.1117/12.401749

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