In this paper, a new prototype model of microgripper using an ICPF actuator as the servo actuator is proposed. The ICPF actuator is made form the film of perfluorosulfonic acid polymer, chemically plated on both sides with platinum. This paper describes the new structure, the motion mechanism and characteristic measurement of a microgripper using an ICPF actuator.
"Microgripper using an ICPF actuator", Proc. SPIE 4223, Instruments for Optics and Optoelectronic Inspection and Control, (5 October 2000); doi: 10.1117/12.401768; https://doi.org/10.1117/12.401768